US 11,866,824 B2
Homoleptic lanthanide deposition precursors
Thomas Knisley, Livonia, MI (US); and Mark Saly, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 9, 2022, as Appl. No. 17/941,123.
Application 17/941,123 is a division of application No. 16/752,618, filed on Jan. 25, 2020, granted, now 11,473,198.
Claims priority of provisional application 62/796,787, filed on Jan. 25, 2019.
Prior Publication US 2023/0027560 A1, Jan. 26, 2023
Int. Cl. C07F 5/00 (2006.01); C09D 1/00 (2006.01); C23C 16/455 (2006.01); C23C 16/18 (2006.01); C23C 16/32 (2006.01); C23C 16/44 (2006.01); C23C 16/38 (2006.01); C23C 16/30 (2006.01); C23C 16/40 (2006.01); C23C 16/34 (2006.01); C23C 16/42 (2006.01); C23C 16/36 (2006.01); C08F 4/54 (2006.01); C08F 136/02 (2006.01)
CPC C23C 16/45553 (2013.01) [C07F 5/003 (2013.01); C08F 4/545 (2013.01); C09D 1/00 (2013.01); C23C 16/18 (2013.01); C23C 16/308 (2013.01); C23C 16/32 (2013.01); C23C 16/34 (2013.01); C23C 16/36 (2013.01); C23C 16/38 (2013.01); C23C 16/40 (2013.01); C23C 16/42 (2013.01); C23C 16/4408 (2013.01); C08F 136/02 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of depositing a film, the method comprising:
exposing a substrate to a lanthanide-containing precursor to form a lanthanide species on the substrate, wherein the lanthanide-containing precursor comprises a metal coordination complex of formula (I)
LnxLy  (I)
wherein
Ln is a lanthanide having an oxidation state of +3 and is selected from the group consisting of Y, Sc, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu,
x is 2,
y is an integer from 2 to 4,
L is selected from NR′CH2CRRO, NR′NCRO, or NR═CHCH=NR, and
R, R′ are independently selected from the group consisting of hydrogen, branched C1-12 alkyl, unbranched C1-12 alkyl, substituted C1-12 aryl, unsubstituted C1-12 aryl, branched C1-6 alkenyl, unbranched C1-6 alkenyl, branched C1-6 alkynyl, unbranched C1-6 alkynyl, acyl, alkyamido, hydrazido, silyl, aldehyde, and keto groups, and the metal coordination complex is a dimer; and
exposing the substrate to a reactant to react with the lanthanide species on the substrate to form a lanthanide film.