CPC C23C 16/4405 (2013.01) [C23C 16/403 (2013.01); C23C 16/4485 (2013.01); H01L 21/02178 (2013.01); H01L 21/02271 (2013.01)] | 14 Claims |
1. A vaporizer comprising:
a precursor vessel in which a liquid precursor is stored;
a first heater immersed in the liquid precursor stored in the precursor vessel and configured to heat the liquid precursor;
a second heater configured to heat the precursor vessel;
a first temperature sensor immersed in the liquid precursor stored in the precursor vessel and configured to measure a temperature of the liquid precursor;
a second temperature sensor immersed in the liquid precursor stored in the precursor vessel and configured to measure a temperature of the liquid precursor;
a liquid surface detection sensor configured to detect a height of a liquid surface of the liquid precursor in the precursor vessel; and
a controller configured to be capable of:
controlling the first heater based on the temperature measured by the first temperature sensor;
controlling the second heater based on the temperature measured by the second temperature sensor; and
stopping heating by the first heater and the second heater, when a position of the liquid surface detected by the liquid surface detection sensor is lower than a predetermined liquid surface range set above the first temperature sensor.
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