CPC C11D 3/30 (2013.01) [C09J 7/30 (2018.01); C11D 3/245 (2013.01); C11D 3/28 (2013.01); C11D 3/43 (2013.01); C11D 11/0047 (2013.01); H01L 21/02057 (2013.01); C09J 2483/00 (2013.01)] | 13 Claims |
1. A cleaning agent composition for use in removal of a polysiloxane adhesive remaining on a substrate, the composition comprising:
a tetrahydrocarbylammonium fluoride, and
a solvent consisting of an organic solvent, wherein the organic solvent contains:
a glycol compound, and
a lactam compound represented by formula (1):
![]() wherein:
R101 represents a C1 to C6 alkyl group, and
R102 represents a C1 to C6 alkylene group;
wherein:
the organic solvent further contains an alkylene glycol dialkyl ether, and
a ratio by mass of the alkylene glycol dialkyl ether to the lactam compound (alkylene glycol dialkyl ether:lactam compound) is 30:70 to 80:20.
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