US 11,866,676 B2
Cleaning agent composition and cleaning method
Hiroshi Ogino, Toyama (JP); Tetsuya Shinjo, Toyama (JP); Ryo Karasawa, Toyama (JP); and Takahisa Okuno, Toyama (JP)
Assigned to NISSAN CHEMICAL CORPORATION, Tokyo (JP)
Appl. No. 17/430,962
Filed by NISSAN CHEMICAL CORPORATION, Tokyo (JP)
PCT Filed Feb. 14, 2020, PCT No. PCT/JP2020/005808
§ 371(c)(1), (2) Date Aug. 13, 2021,
PCT Pub. No. WO2020/166702, PCT Pub. Date Aug. 20, 2020.
Claims priority of application No. 2019-026052 (JP), filed on Feb. 15, 2019.
Prior Publication US 2022/0145218 A1, May 12, 2022
Int. Cl. C11D 7/50 (2006.01); C11D 3/30 (2006.01); C09J 7/30 (2018.01); C11D 3/24 (2006.01); C11D 3/28 (2006.01); C11D 3/43 (2006.01); C11D 11/00 (2006.01); H01L 21/02 (2006.01)
CPC C11D 3/30 (2013.01) [C09J 7/30 (2018.01); C11D 3/245 (2013.01); C11D 3/28 (2013.01); C11D 3/43 (2013.01); C11D 11/0047 (2013.01); H01L 21/02057 (2013.01); C09J 2483/00 (2013.01)] 13 Claims
 
1. A cleaning agent composition for use in removal of a polysiloxane adhesive remaining on a substrate, the composition comprising:
a tetrahydrocarbylammonium fluoride, and
a solvent consisting of an organic solvent, wherein the organic solvent contains:
a glycol compound, and
a lactam compound represented by formula (1):

OG Complex Work Unit Chemistry
wherein:
R101 represents a C1 to C6 alkyl group, and
R102 represents a C1 to C6 alkylene group;
wherein:
the organic solvent further contains an alkylene glycol dialkyl ether, and
a ratio by mass of the alkylene glycol dialkyl ether to the lactam compound (alkylene glycol dialkyl ether:lactam compound) is 30:70 to 80:20.