US 11,865,839 B2
Nozzle plate nozzle plate manufacturing method and inkjet head
Akihisa Yamada, Hino (JP)
Assigned to KONICA MINOLTA, INC., Tokyo (JP)
Appl. No. 17/631,715
Filed by KONICA MINOLTA, INC., Tokyo (JP)
PCT Filed Jul. 30, 2019, PCT No. PCT/JP2019/029871
§ 371(c)(1), (2) Date Jan. 31, 2022,
PCT Pub. No. WO2021/019693, PCT Pub. Date Feb. 4, 2021.
Prior Publication US 2022/0266595 A1, Aug. 25, 2022
Int. Cl. B41J 2/14 (2006.01); B41J 2/16 (2006.01)
CPC B41J 2/1433 (2013.01) [B41J 2/162 (2013.01); B41J 2/164 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A nozzle plate comprising, on a substrate: at least a base layer; an intermediate layer; and a liquid repellent layer,
wherein the base layer contains a silane coupling agent A having reactive functional groups at both terminals and including a hydrocarbon chain and a benzene ring at an intermediate part;
the intermediate layer contains an inorganic oxide; and
the liquid repellent layer contains a fluorine (F)-containing coupling agent B;
wherein the silane coupling agent A contained in the base layer is a compound having a structure represented by the following general formula (1):
X5Q3-sSi(CH2)tC6H4(CH2)uSiR3-mXm  General formula (1)
wherein Q and R each represent a methyl group or an ethyl group, t and u each represent a natural number of 1 to 10, and s and m each represent a natural number of 1 to 3; when s is 1 and m is 1, two Q and two R are present, and the two Q and R each have the same structure or different structures; C6H4 is a phenylene group; and X represents an alkoxy group, a chlorine, an acyloxy group, or an amino group.