CPC B41J 2/1433 (2013.01) [B41J 2/162 (2013.01); B41J 2/164 (2013.01)] | 10 Claims |
1. A nozzle plate comprising, on a substrate: at least a base layer; an intermediate layer; and a liquid repellent layer,
wherein the base layer contains a silane coupling agent A having reactive functional groups at both terminals and including a hydrocarbon chain and a benzene ring at an intermediate part;
the intermediate layer contains an inorganic oxide; and
the liquid repellent layer contains a fluorine (F)-containing coupling agent B;
wherein the silane coupling agent A contained in the base layer is a compound having a structure represented by the following general formula (1):
X5Q3-sSi(CH2)tC6H4(CH2)uSiR3-mXm General formula (1)
wherein Q and R each represent a methyl group or an ethyl group, t and u each represent a natural number of 1 to 10, and s and m each represent a natural number of 1 to 3; when s is 1 and m is 1, two Q and two R are present, and the two Q and R each have the same structure or different structures; C6H4 is a phenylene group; and X represents an alkoxy group, a chlorine, an acyloxy group, or an amino group.
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