CPC A61B 8/4494 (2013.01) [A61B 8/5207 (2013.01); G01N 29/0654 (2013.01); G01N 29/2406 (2013.01); G01N 29/348 (2013.01); H01H 1/0036 (2013.01); H01H 59/0009 (2013.01); H01H 2059/0018 (2013.01)] | 21 Claims |
1. A capacitive radio frequency micro-electromechanical switch (RFMEMS), comprising:
a substrate;
a first electrode connected to the substrate;
a flexible membrane at least partially spatially separated from the first electrode;
a second electrode connected to the flexible membrane; and
a dielectric stack disposed between the first electrode and the second electrode and flexible membrane, comprising:
a first dielectric layer having a first density of electrically active defects; and
a second dielectric layer having a second density of electrically active defects, lower than the first, wherein the first and second dielectric layers comprise an oxide of the same material.
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