US 10,893,599 B2
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element
Alexey Kuritsyn, San Jose, CA (US); Brian Ahr, San Jose, CA (US); Rudy F. Garcia, Union City, CA (US); Frank Chilese, San Ramon, CA (US); and Oleg Khodykin, San Diego, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA-Tencor Corporation, Milpitas, CA (US)
Filed on Jul. 9, 2018, as Appl. No. 16/30,693.
Application 16/030,693 is a division of application No. 15/265,515, filed on Sep. 14, 2016, granted, now 10,021,773.
Claims priority of provisional application 62/255,824, filed on Nov. 16, 2015.
Prior Publication US 2019/0075641 A1, Mar. 7, 2019
Int. Cl. H05G 2/00 (2006.01)
CPC H05G 2/008 (2013.01) 9 Claims
OG exemplary drawing
1. A device comprising:
a cylindrically-symmetric element rotatable about an axis and having a surface coated with a band of plasma-forming target material for irradiation by a drive laser to produce plasma;
a subsystem for replenishing plasma-forming target material on the cylindrically-symmetric element; and
a wiper positioned to scrape plasma-forming target material on the cylindrically-symmetric element to establish a uniform thickness of plasma-forming target material; and
a measurement system outputting a signal indicative of a radial distance between the wiper edge and the axis, wherein the measurement system comprises a light emitter and a light sensor.