US 10,892,224 B2
Apparatuses comprising protective material along surfaces of tungsten-containing structures
Luca Fumagalli, Boise, ID (US); and Davide Colombo, Boise, ID (US)
Assigned to Micron Technology, Inc., Boise, ID (US)
Filed by Micron Technology, Inc., Boise, ID (US)
Filed on Feb. 26, 2018, as Appl. No. 15/904,683.
Prior Publication US 2019/0267328 A1, Aug. 29, 2019
Int. Cl. H01L 23/52 (2006.01); H01L 23/532 (2006.01); H01L 23/528 (2006.01); H01L 27/108 (2006.01); H01L 21/768 (2006.01); H01L 21/285 (2006.01); H01L 21/02 (2006.01)
CPC H01L 23/53266 (2013.01) [H01L 21/0217 (2013.01); H01L 21/02164 (2013.01); H01L 21/28556 (2013.01); H01L 21/76834 (2013.01); H01L 21/76852 (2013.01); H01L 21/76877 (2013.01); H01L 21/76892 (2013.01); H01L 23/528 (2013.01); H01L 23/5329 (2013.01); H01L 27/108 (2013.01); H01L 27/10805 (2013.01); H01L 27/10885 (2013.01)] 5 Claims
OG exemplary drawing
1. An apparatus comprising:
a series of tungsten-containing lines extending across a supporting base; the tungsten-containing lines being spaced apart from one another;
each of the tungsten-containing lines comprising, along a cross-section, a bottom surface facing the supporting base and being in direct physical contact with a conductive structure, an opposing top surface consisting essentially of tungsten, and a pair of sidewall surfaces consisting essentially of tungsten extending downwardly from the top surface, the conductive structure and the tungsten-containing line being of an identical width; and
protective material along the top surfaces and the sidewall surfaces of the tungsten-containing lines; the protective material comprising titanium nitride; the titanium nitride of the protective material having a surface consisting essentially of titanium nitride directly against the top and sidewall surfaces that consist essentially of tungsten.