US 10,892,178 B2
Substrate processing system, method of controlling substrate processing system, computer-readable storage medium, and method of manufacturing article
Mitsuhiro Masuda, Utsunomiya (JP); and Kenji Yamamoto, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on May 16, 2019, as Appl. No. 16/413,767.
Claims priority of application No. 2018-102616 (JP), filed on May 29, 2018; and application No. 2019-034743 (JP), filed on Feb. 27, 2019.
Prior Publication US 2019/0371637 A1, Dec. 5, 2019
Int. Cl. H01L 21/67 (2006.01); G05B 19/418 (2006.01)
CPC H01L 21/67276 (2013.01) [G05B 19/41875 (2013.01); G05B 2219/31455 (2013.01); G05B 2219/32234 (2013.01); G05B 2219/45031 (2013.01)] 23 Claims
OG exemplary drawing
 
14. A substrate processing system having a plurality of substrate processing apparatuses operable to process a substrate, a host control apparatus operable to control operation of the plurality of substrate processing apparatuses, and a management apparatus operable to manage maintenance of each of the plurality of substrate processing apparatus,
the management apparatus comprising:
a determination unit configured to determine a substrate processing apparatus that needs maintenance processing, based on operation information collected from each of the plurality of substrate processing apparatuses; and
a notification unit configured to notify, to the host control apparatus, information for executing the maintenance processing with respect to the substrate processing apparatus determined by the determination unit to need the maintenance processing, and
the host control apparatus comprising
a controller configured to monitor an operation state of each of the plurality of substrate processing apparatuses, and, based on the operation state of the substrate processing apparatus determined by the determination unit to need the maintenance processing, control a timing of performance of the maintenance processing with respect to the substrate processing apparatus.