US 10,892,167 B2
Gas permeable superstrate and methods of using the same
James P. De Young, Dallas, TX (US); Weijun Liu, Cedar Park, TX (US); and Fen Wan, Austin, TX (US)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Mar. 5, 2019, as Appl. No. 16/293,053.
Prior Publication US 2020/0286740 A1, Sep. 10, 2020
Int. Cl. H01L 21/3105 (2006.01); H01L 21/02 (2006.01)
CPC H01L 21/31051 (2013.01) [H01L 21/02118 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A superstrate, comprising:
a body, wherein the body comprises a contact surface; and
an amorphous fluoropolymer layer on the contact surface of the body, wherein the amorphous fluoropolymer layer is permeable to gases having an atomic mass greater than 4, wherein the amorphous fluoropolymer layer has a helium permeability coefficient of greater than 2.5×10−8 cm3*cm/cm2*S*cmHg.