US 10,892,140 B2
Nanosecond pulser bias compensation
Timothy Ziemba, Bainbridge, WA (US); Ilia Slobodov, Seattle, WA (US); John Carscadden, Seattle, WA (US); Kenneth Miller, Seattle, WA (US); and Morgan Quinley, Seattle, WA (US)
Assigned to Eagle Harbor Technologies, Inc., Seattle, WA (US)
Filed by Eagle Harbor Technologies, Inc., Seattle, WA (US)
Filed on Jul. 26, 2019, as Appl. No. 16/523,840.
Claims priority of provisional application 62/711,406, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,464, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,334, filed on Jul. 28, 2018.
Claims priority of provisional application 62/711,457, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,347, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,467, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,468, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,523, filed on Aug. 10, 2018.
Claims priority of provisional application 62/789,523, filed on Jan. 8, 2019.
Claims priority of provisional application 62/789,526, filed on Jan. 8, 2019.
Prior Publication US 2020/0035457 A1, Jan. 30, 2020
Int. Cl. H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H02M 3/335 (2006.01); H03K 3/57 (2006.01); H05K 7/20 (2006.01); H03M 1/12 (2006.01)
CPC H01J 37/32146 (2013.01) [H01J 37/32082 (2013.01); H01J 37/32091 (2013.01); H01J 37/32128 (2013.01); H01J 37/32174 (2013.01); H01J 37/32541 (2013.01); H01J 37/32568 (2013.01); H01J 37/32715 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); H02M 3/33523 (2013.01); H03K 3/57 (2013.01); H03M 1/12 (2013.01); H05K 7/20154 (2013.01); H05K 7/20172 (2013.01); H05K 7/20254 (2013.01); H05K 7/20272 (2013.01); H05K 7/20281 (2013.01); H05K 7/20509 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A high voltage power system comprising:
a high voltage pulsing power supply;
a transformer electrically coupled with the high voltage pulsing power supply;
an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a pulse repetition frequency greater than 1 kHz;
a bias compensation circuit arranged in parallel with the output, the bias compensation circuit comprising:
a bias compensation diode; and
a DC power supply arranged in series with the bias compensation diode; and
an electrode disposed within a plasma chamber, the electrode electrically coupled with the output, the electrode electrically coupled with the bias compensation circuit, and the electrode capacitively coupled with a plasma when the plasma is formed within the plasma chamber.