US 10,892,134 B2
X-ray generator
Masaaki Yamakata, Akishima (JP); Tomohiro Chaki, Akishima (JP); and Masaru Kuribayashi, Akishima (JP)
Assigned to RIGAKU CORPORATION, Akishima (JP)
Filed by RIGAKU CORPORATION, Akishima (JP)
Filed on Aug. 29, 2018, as Appl. No. 16/116,196.
Claims priority of application No. 2017-170242 (JP), filed on Sep. 5, 2017.
Prior Publication US 2019/0074155 A1, Mar. 7, 2019
Int. Cl. H01J 35/10 (2006.01)
CPC H01J 35/106 (2013.01) [H01J 2235/1262 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An X-ray generator comprising:
a target for receiving electrons and generating X-rays;
a separator for dividing an internal space of the target into a coolant inflow path and a coolant outflow path;
a target driving device for rotating said target;
a cooling system for supplying a coolant to said coolant inflow path and recovering the coolant through said coolant outflow path;
a hollow inner tube for supporting said separator so that the separator can rotate about a center of the separator; and
a gap for allowing said separator to rotate independently of the inner tube, the gap being provided to a portion of said inner tube that supports said separator;
wherein said separator rotates in the same rotation direction as said target when the target rotates.