US 10,890,540 B2
Object identification and comparison
Adrianus Cornelis Matheus Koopman, Hilversum (NL); Scott Anderson Middlebrooks, Duizel (NL); and Willem Marie Julia Marcel Coene, Geldrop (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 16/490,091
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Mar. 2, 2018, PCT No. PCT/EP2018/055164
§ 371(c)(1), (2) Date Aug. 30, 2019,
PCT Pub. No. WO2018/172039, PCT Pub. Date Sep. 27, 2018.
Claims priority of provisional application 62/474,571, filed on Mar. 21, 2017.
Prior Publication US 2020/0072761 A1, Mar. 5, 2020
Int. Cl. G06F 30/398 (2020.01); G01N 21/956 (2006.01); G03F 7/20 (2006.01)
CPC G01N 21/95607 (2013.01) [G03F 7/70625 (2013.01); G03F 7/70741 (2013.01); G06F 30/398 (2020.01)] 20 Claims
OG exemplary drawing
1. A method comprising:
selecting a shaped feature from a set of shaped features, each shaped feature of the set of shaped features having a set of points on a perimeter of the shape of the shaped feature and the set of shaped features being from a layout for imaging onto a substrate having a radiation-sensitive layer by a lithographic process and/or being from an image taken from the substrate processed by the lithographic process;
creating, by a hardware computer, a plurality of shape context descriptors for the selected shaped feature, wherein each shape context descriptor provides an indication of a location in a shape context descriptor framework of a first focus point of the set of points in relation to a second point of the set of points; and
identifying, by the hardware computer, a shaped feature from the set of shaped features having a same or similar shape as the selected shaped feature based on data from the plurality of shape context descriptors.