US 10,889,857 B2
Method to fabricate a nanochannel for DNA sequencing based on narrow trench patterning process
Xiaomin Yang, Livermore, CA (US); ShuaiGang Xiao, Fremont, CA (US); David S. Kuo, Palo Alto, CA (US); Koichi Wago, Sunnyvale, CA (US); and Thomas Young Chang, Menlo Park, CA (US)
Assigned to SEAGATE TECHNOLOGY LLC, Fremont, CA (US)
Filed on Feb. 1, 2018, as Appl. No. 15/886,533.
Claims priority of provisional application 62/453,307, filed on Feb. 1, 2017.
Prior Publication US 2018/0216179 A1, Aug. 2, 2018
Int. Cl. C12Q 1/6869 (2018.01); B82Y 15/00 (2011.01); C12M 1/34 (2006.01)
CPC C12Q 1/6869 (2013.01) [C12M 1/34 (2013.01); B82Y 15/00 (2013.01); C12Q 2563/159 (2013.01)] 19 Claims
OG exemplary drawing
1. A DNA sequencing device, comprising:
a substrate;
a nanochannel extending through a portion of the substrate, the nanochannel having a width in the range of about 0.3 nm to about 20 nm;
a pair of in-plane electrodes positioned in the substrate and arranged substantially perpendicular to the nanochannel, a portion of each electrode being exposed in the nanochannel to form an electrode gap, the electrode gap being in the range of about 0.3 nm to about 2 nm, wherein at least one of the pair of in-plane electrodes is a suspended electrode coupled with an actuator.