US 10,889,857 B2
Method to fabricate a nanochannel for DNA sequencing based on narrow trench patterning process
Xiaomin Yang, Livermore, CA (US); ShuaiGang Xiao, Fremont, CA (US); David S. Kuo, Palo Alto, CA (US); Koichi Wago, Sunnyvale, CA (US); and Thomas Young Chang, Menlo Park, CA (US)
Assigned to SEAGATE TECHNOLOGY LLC, Fremont, CA (US)
Filed by SEAGATE TECHNOLOGY LLC, Cupertino, CA (US)
Filed on Feb. 1, 2018, as Appl. No. 15/886,533.
Claims priority of provisional application 62/453,307, filed on Feb. 1, 2017.
Prior Publication US 2018/0216179 A1, Aug. 2, 2018
Int. Cl. C12Q 1/6869 (2018.01); B82Y 15/00 (2011.01); C12M 1/34 (2006.01)
CPC C12Q 1/6869 (2013.01) [C12M 1/34 (2013.01); B82Y 15/00 (2013.01); C12Q 2563/159 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A DNA sequencing device, comprising:
a substrate;
a nanochannel extending through a portion of the substrate, the nanochannel having a width in the range of about 0.3 nm to about 20 nm;
a pair of in-plane electrodes positioned in the substrate and arranged substantially perpendicular to the nanochannel, a portion of each electrode being exposed in the nanochannel to form an electrode gap, the electrode gap being in the range of about 0.3 nm to about 2 nm, wherein at least one of the pair of in-plane electrodes is a suspended electrode coupled with an actuator.