US 10,889,490 B2
Electrothermally actuated microelectromechanical and/or nanoelectromechanical structure providing increased efficiency
Guillaume Jourdan, Grenoble (FR); and Guillaume Lehee, Boulogne Billancourt (FR)
Assigned to COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR); and SAFRAN ELECTRONICS & DEFENSE, Boulogne Billancourt (FR)
Appl. No. 15/768,870
Filed by COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR); and SAFRAN ELECTRONICS & DEFENSE, Boulogne Billancourt (FR)
PCT Filed Oct. 20, 2016, PCT No. PCT/EP2016/075188
§ 371(c)(1), (2) Date Apr. 17, 2018,
PCT Pub. No. WO2017/068025, PCT Pub. Date Apr. 27, 2017.
Claims priority of application No. 15 60043 (FR), filed on Oct. 21, 2015.
Prior Publication US 2018/0327253 A1, Nov. 15, 2018
This patent is subject to a terminal disclaimer.
Int. Cl. B81B 3/00 (2006.01); B81B 7/02 (2006.01); G02B 6/35 (2006.01); G02B 26/08 (2006.01)
CPC B81B 3/0024 (2013.01) [B81B 7/02 (2013.01); G02B 6/3584 (2013.01); G02B 26/0841 (2013.01); B81B 3/0086 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/0271 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An electrothermally actuated device comprising:
at least one of a microelectromechanical structure and a nanoelectromechanical structure, said at least one of the microelectromechanical structure and the nanoelectromechanical structure comprising
a fixed part,
at least one movable part configured to move with respect to the fixed part,
at least one set of several electrothermal actuation beams configured to flow an electric current from the fixed part to the movable part, to mechanically connect to the movable part, and configured to simultaneously apply an electrothermal force having a same direction on the movable part, and
at least one electrically conducting connecting element configured to electrically connect the movable part to the fixed part,
wherein the set of several electrothermal actuation beams has a cross-sectional thickness lower than or equal to half a thickness of the movable part and lower than or equal to half a thickness of the at least one electrically conducting connecting element, and the electrothermal actuation beams are nanowires.