US 12,193,334 B2
Manufacturing techniques and devices using dielectric elastomers
Mihai Duduta, Somerville, MA (US); David Clarke, Cambridge, MA (US); and Robert J. Wood, Cambridge, MA (US)
Assigned to President and Fellows of Harvard College, Cambridge, MA (US)
Appl. No. 16/087,431
Filed by President and Fellows of Harvard College, Cambridge, MA (US)
PCT Filed Mar. 20, 2017, PCT No. PCT/US2017/023186
§ 371(c)(1), (2) Date Sep. 21, 2018,
PCT Pub. No. WO2017/165282, PCT Pub. Date Sep. 28, 2017.
Claims priority of provisional application 62/311,029, filed on Mar. 21, 2016.
Prior Publication US 2019/0103549 A1, Apr. 4, 2019
Int. Cl. H01L 41/193 (2006.01); C08G 59/18 (2006.01); C08G 59/22 (2006.01); C08K 3/013 (2018.01); C08L 33/08 (2006.01); C08L 75/04 (2006.01); C08L 83/04 (2006.01); H01B 1/24 (2006.01); H01L 41/047 (2006.01); H01L 41/253 (2013.01); H01L 41/297 (2013.01); H01L 41/45 (2013.01); H10N 30/04 (2023.01); H10N 30/05 (2023.01); H10N 30/067 (2023.01); H10N 30/098 (2023.01); H10N 30/50 (2023.01); H10N 30/857 (2023.01); H10N 30/87 (2023.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01)
CPC H10N 30/857 (2023.02) [C08G 59/18 (2013.01); C08G 59/22 (2013.01); C08K 3/013 (2018.01); C08L 33/08 (2013.01); C08L 75/04 (2013.01); C08L 83/04 (2013.01); H01B 1/24 (2013.01); H10N 30/04 (2023.02); H10N 30/05 (2023.02); H10N 30/067 (2023.02); H10N 30/098 (2023.02); H10N 30/50 (2023.02); H10N 30/871 (2023.02); H10N 30/878 (2023.02); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C08K 2201/001 (2013.01); C08L 2203/20 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of making a dielectric elastomer device, comprising:
depositing conductive particles on a first dielectric elastomer layer to form a first electrode of the dielectric elastomer device;
applying a liquid elastomer over the conductive particles and the first dielectric elastomer layer so that a portion of the liquid elastomer permeates the first electrode, wherein the portion of the liquid elastomer that permeates the first electrode contacts portions of the first dielectric elastomer layer that are positioned under the first electrode; and
at least partially curing the liquid elastomer to form a second dielectric elastomer layer that is directly bonded with the contacted portions of the first dielectric elastomer layer.