US 12,193,332 B2
Method of manufacturing piezoelectric ceramics, piezoelectric ceramics, piezoelectric element, ultrasonic motor, optical apparatus, dust removing device, image pickup apparatus, ultrasonic probe, ultrasonic diagnostic apparatus, and electronic apparatus
Tatsuo Furuta, Tokyo (JP); Takanori Matsuda, Tokyo (JP); Hisato Yabuta, Tokyo (JP); and Akira Uebayashi, Tokyo (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Apr. 5, 2021, as Appl. No. 17/222,120.
Claims priority of application No. 2020-074641 (JP), filed on Apr. 20, 2020.
Prior Publication US 2021/0328131 A1, Oct. 21, 2021
Int. Cl. H01L 41/18 (2006.01); B06B 1/06 (2006.01); B08B 7/02 (2006.01); C04B 35/468 (2006.01); C04B 35/645 (2006.01); H04N 23/81 (2023.01); H10N 30/097 (2023.01); H10N 30/853 (2023.01); G02B 7/14 (2021.01)
CPC H10N 30/097 (2023.02) [B06B 1/0622 (2013.01); B08B 7/028 (2013.01); C04B 35/4682 (2013.01); C04B 35/645 (2013.01); H04N 23/811 (2023.01); H10N 30/8536 (2023.02); C04B 2235/3208 (2013.01); C04B 2235/3215 (2013.01); C04B 2235/3263 (2013.01); C04B 2235/3298 (2013.01); C04B 2235/768 (2013.01); G02B 7/14 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A piezoelectric ceramics comprising titanium and barium as main components,
wherein the piezoelectric ceramics has an electromechanical coupling coefficient k31 at room temperature of 0.252 or more, and
wherein the piezoelectric ceramics has a roughness Ra of 0.19 μm or less on at least a part of a surface thereof.