US 12,193,313 B2
Non-equilibrium thermal curing processes
George Burkhard, Redwood City, CA (US); and Daniel Slotcavage, Menlo Park, CA (US)
Assigned to Sinovia Technologies, San Carlos, CA (US)
Filed by Sinovia Technologies, San Carlos, CA (US)
Filed on Aug. 19, 2020, as Appl. No. 16/997,677.
Application 16/997,677 is a continuation of application No. PCT/US2020/021812, filed on Mar. 10, 2020.
Claims priority of provisional application 62/863,038, filed on Jun. 18, 2019.
Claims priority of provisional application 62/823,425, filed on Mar. 25, 2019.
Prior Publication US 2020/0381647 A1, Dec. 3, 2020
Int. Cl. H10K 71/40 (2023.01); H10K 50/11 (2023.01); H10K 50/125 (2023.01); H10K 50/15 (2023.01); H10K 50/17 (2023.01); H10K 71/00 (2023.01); H10K 71/60 (2023.01); H10K 50/81 (2023.01); H10K 50/82 (2023.01)
CPC H10K 71/00 (2023.02) [H10K 50/125 (2023.02); H10K 50/15 (2023.02); H10K 50/171 (2023.02); H10K 71/441 (2023.02); H10K 71/611 (2023.02); H10K 50/11 (2023.02); H10K 50/81 (2023.02); H10K 50/82 (2023.02)] 16 Claims
OG exemplary drawing
 
1. A method, comprising:
providing a stack of layers including:
a substrate and one or more electronically-active layers disposed on a surface of the substrate; and
a thermally-curable layer of organic material comprising a polymer or polymerizable material applied over the one or more electronically-active layers, including a respective organic layer of the one or more electronically-active layers; and
illuminating, for less than a thermalization time of the stack of layers, a surface of the stack of layers to initiate a non-equilibrium thermal process that includes raising a temperature of the thermally-curable layer of organic material, comprising the polymer or polymerizable material, above a first temperature for a length of time sufficient to polymerize and/or cross-link the thermally-curable layer of organic material while maintaining the one or more electronically-active layers, including the respective organic layer, below a second temperature that is less than the first temperature, wherein:
the one or more electronically-active layers is robust to temperatures below the second temperature, and
the second temperature is a glass transition temperature for the respective organic layer in the one or more electronically-active layers.