US 12,193,296 B2
Conductive pattern having first and second capping layers and display device including the same
Hyun Eok Shin, Gyeonggi-do (KR); Do Keun Song, Yongin-si (KR); Dong Min Lee, Anyang-si (KR); Joon Yong Park, Gunpo-si (KR); Hyun Ah Sung, Suwon-si (KR); Yun Jong Yeo, Hwaseong-si (KR); and Dae Won Choi, Cheonan-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Apr. 11, 2022, as Appl. No. 17/717,554.
Claims priority of application No. 10-2021-0124985 (KR), filed on Sep. 17, 2021.
Prior Publication US 2023/0086407 A1, Mar. 23, 2023
Int. Cl. H10K 59/131 (2023.01)
CPC H10K 59/1315 (2023.02) 20 Claims
OG exemplary drawing
 
1. A conductive pattern comprising:
a conductive layer including aluminum;
a first capping layer disposed on the conductive layer and including titanium; and
a second capping layer disposed on the first capping layer and including titanium nitride,
wherein a mixed region in which the aluminum and the titanium are mixed with each other is disposed in at least portions of the conductive layer and the first capping layer.