US 12,193,273 B2
Method for fabricating displaying backplane, displaying backplane and displaying device
Jing Wang, Beijing (CN); Hongwei Tian, Beijing (CN); Ming Liu, Beijing (CN); Jia Zhao, Beijing (CN); Qiuhua Meng, Beijing (CN); and Ziang Han, Beijing (CN)
Assigned to BOE Technology Group Co., Ltd., Beijing (CN)
Filed by BOE Technology Group Co., Ltd., Beijing (CN)
Filed on Nov. 17, 2023, as Appl. No. 18/512,114.
Application 18/512,114 is a division of application No. 17/485,764, filed on Sep. 27, 2021, granted, now 11,864,422.
Claims priority of application No. 202110180434.4 (CN), filed on Feb. 9, 2021.
Prior Publication US 2024/0090267 A1, Mar. 14, 2024
Int. Cl. H10K 59/121 (2023.01); H10K 59/122 (2023.01); H10K 59/124 (2023.01); H10K 71/00 (2023.01); H01L 21/02 (2006.01); H01L 27/12 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); H10K 59/12 (2023.01)
CPC H10K 59/1213 (2023.02) [H10K 59/122 (2023.02); H10K 59/124 (2023.02); H10K 71/00 (2023.02); H01L 21/02565 (2013.01); H01L 27/1225 (2013.01); H01L 27/1248 (2013.01); H01L 27/127 (2013.01); H01L 29/66969 (2013.01); H01L 29/7869 (2013.01); H01L 29/78696 (2013.01); H10K 59/1201 (2023.02)] 6 Claims
OG exemplary drawing
 
1. A displaying backplane, wherein the displaying backplane comprises:
a substrate base plate;
a first active layer and a second active layer that are provided on the substrate base plate, wherein a material of the first active layer and the second active layer is an oxide semiconductor, the first active layer has a first channel region and first no-channel regions that are located on two sides of the first channel region, and the second active layer has a second channel region and second no-channel regions that are located on two sides of the second channel region;
a first grid insulating layer covering the first active layer and the second active layer; and
a first grid and a second grid that are provided on the first grid insulating layer, wherein an orthographic projection of the first grid on the first active layer coincides with the first channel region, and an orthographic projection of the second grid on the second active layer coincides with the second channel region;
wherein an oxygen-vacancy concentration of the first channel region is greater than oxygen-vacancy concentrations of the first no-channel regions, the second no-channel regions and the second channel region.