US 12,193,271 B2
Display apparatus and method of manufacturing the same
Dongmin Lee, Yongin-si (KR); Jaewoo Jeong, Yongin-si (KR); Janghyun Kim, Yongin-si (KR); Jongoh Seo, Yongin-si (KR); and Byungsoo So, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-Si (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Apr. 7, 2022, as Appl. No. 17/715,553.
Claims priority of application No. 10-2021-0144967 (KR), filed on Oct. 27, 2021.
Prior Publication US 2023/0128109 A1, Apr. 27, 2023
Int. Cl. H10K 59/121 (2023.01); H10K 71/00 (2023.01); H01L 27/12 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); H10K 59/12 (2023.01)
CPC H10K 59/1213 (2023.02) [H10K 71/00 (2023.02); H01L 27/1222 (2013.01); H01L 27/1274 (2013.01); H01L 29/66757 (2013.01); H01L 29/78675 (2013.01); H10K 59/1201 (2023.02)] 13 Claims
OG exemplary drawing
 
1. A method for manufacturing a display apparatus, the method comprising:
forming an amorphous silicon layer on a substrate;
heat-treating the amorphous silicon layer to form a heat-treated amorphous silicon layer;
doping the heat-treated amorphous silicon layer with hydrogen to form a hydrogen-doped amorphous silicon layer; and
crystallizing the hydrogen-doped amorphous silicon layer into a polycrystalline silicon layer by irradiating a laser to the hydrogen-doped amorphous silicon layer,
wherein the hydrogen-doped amorphous silicon layer includes a first portion and a second portion,
wherein the first portion is positioned between the substrate and the second portion, and
wherein a hydrogen content of the first portion is greater than a hydrogen content of the second portion.