CPC H05K 7/20509 (2013.01) [H05K 7/20254 (2013.01); H05K 7/20418 (2013.01)] | 17 Claims |
1. A flow chamber, comprising:
an upper chamber including a top wall;
an actuator located distally from the top wall; and
a lower chamber including a bottom wall and a sidewall, the lower chamber receiving a fluid from the upper chamber when the actuator is activated, the bottom wall having a plurality of orifices therein, the plurality of orifices being vertically aligned with a portion of the actuator and allowing the fluid to exit the lower chamber;
wherein the bottom wall includes at least one cavity therein, the at least one cavity being proximate to the sidewall and distally located from the plurality of orifices;
wherein the actuator includes an anchored region coupled to a support structure and a cantilevered arm, the cantilevered arm including a step region and an extension region, the step region having a step thickness, the extension region extending outward from the step region and having an extension thickness less than the step thickness.
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