US 12,193,140 B2
Controller and control techniques for linear accelerator and ion implanter having linear accelarator
Keith E. Kowal, Swampscott, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 22, 2022, as Appl. No. 18/145,307.
Application 18/145,307 is a continuation of application No. 16/828,899, filed on Mar. 24, 2020, granted, now 11,576,252.
Prior Publication US 2023/0125883 A1, Apr. 27, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H05H 7/02 (2006.01); H01J 37/08 (2006.01); H01J 37/317 (2006.01); H03K 5/1536 (2006.01); H03L 7/081 (2006.01); H05H 7/22 (2006.01)
CPC H05H 7/02 (2013.01) [H01J 37/08 (2013.01); H05H 7/22 (2013.01); H01J 37/3171 (2013.01); H03K 5/1536 (2013.01); H03L 7/081 (2013.01); H05H 2007/025 (2013.01); H05H 2007/225 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a digital master clock generator;
a master waveform generator to output an analog sinewave;
a plurality of local resonator controllers, coupled to the master waveform generator and the digital master clock generator, wherein a given local resonator controller of the plurality of local resonator controllers comprises:
a first input, coupled to receive a resonator output voltage pickup signal from a local resonator, a second input coupled to receive a digital master clock signal from the digital master clock generator, and a first output coupled to send a delay signal to the master waveform generator; and a tuning circuit, to output a tuning signal to an adjustable component of the local resonator, responsive to the resonator output voltage pickup signal.
 
9. A linear accelerator, comprising:
a plurality of stages, wherein a given stage of the plurality of stages comprises a local resonator; and a resonator control assembly, coupled to the plurality of stages, the resonator control assembly comprising:
a digital master clock generator, to generate a digital master clock signal; a master waveform generator, to output an analog sinewave; and
a plurality of local resonator controllers, coupled to the master waveform generator and the digital master clock generator, wherein a given local resonator controller comprises:
a first input coupled to receive a resonator output voltage pickup signal from the local resonator, a second input coupled to receive the digital master clock signal, and a first output coupled to send a delay signal to the master waveform generator; and
a tuning circuit, to output a tuning signal to an adjustable component of the local resonator, responsive to the resonator output voltage pickup signal.