US 12,192,702 B2
MEMS speaker
Qiang Dan, Shenzhen (CN); Yu Shen, Shenzhen (CN); Yiwei Zhou, Shenzhen (CN); and Yang Li, Shenzhen (CN)
Assigned to AAC Kaitai Technologies (Wuhan) CO., LTD, Wuhan (CN); and AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD., Shenzhen (CN)
Filed by AAC Kaitai Technologies (Wuhan) CO., LTD, Hubei (CN); and AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD., Shenzhen (CN)
Filed on Oct. 19, 2022, as Appl. No. 17/969,668.
Claims priority of application No. 202221548281.0 (CN), filed on Jun. 20, 2022.
Prior Publication US 2023/0412988 A1, Dec. 21, 2023
Int. Cl. H04R 17/00 (2006.01)
CPC H04R 17/00 (2013.01) [H04R 2201/003 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A micro-electromechanical system (MEMS) MEMS speaker including:
a substrate enclosing a cavity and being provided with openings at both ends;
a cantilever beam extending from one end of the substrate to the cavity and at least partially suspended above the cavity;
a piezoelectric actuator fixed on a side of the cantilever beam away from the cavity;
a polymer layer disposed on a side of the piezoelectric actuator away from the cavity and attached to the cantilever beam and the piezoelectric actuator for completely covering the cantilever beam, the piezoelectric actuator and the cavity;
a piezoelectric composite vibration structure formed by the polymer layer, the cantilever beam and the piezoelectric actuator for generating vibration and sound;
wherein
the cantilever beam includes a first section fixed to the substrate, a second section extending from the first section to the cavity and suspended above the cavity, and a third section extending from the second section away from the first section, an end of the third section away from the second section being suspended; and
the piezoelectric actuator is only fixed with the third section;
the MEMS speaker further includes a weight connected to the polymer layer or the cantilever beam; the weight is adjustable in height and extends at least partially into the cavity.