US 12,191,842 B2
Acoustic wave device
Yasumasa Taniguchi, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Sep. 26, 2022, as Appl. No. 17/952,369.
Application 17/952,369 is a continuation of application No. PCT/JP2021/012923, filed on Mar. 26, 2021.
Claims priority of application No. 2020-063191 (JP), filed on Mar. 31, 2020.
Prior Publication US 2023/0016324 A1, Jan. 19, 2023
Int. Cl. H03H 9/17 (2006.01); H03H 9/125 (2006.01); H03H 9/25 (2006.01); H03H 9/54 (2006.01)
CPC H03H 9/175 (2013.01) [H03H 9/125 (2013.01); H03H 9/25 (2013.01); H03H 9/54 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a first acoustic wave resonator and a second acoustic wave resonator, the first acoustic wave resonator and the second acoustic wave resonator being electrically connected with each other;
a piezoelectric layer including a first main surface and a second main surface which are opposed to each other;
a first upper electrode on the first main surface;
a second upper electrode on the first main surface;
a first lower electrode on the second main surface of the piezoelectric layer so as to overlap with the first upper electrode in a plan view;
a second lower electrode on the second main surface of the piezoelectric layer so as to overlap with the second upper electrode in the plan view;
a first resonator portion defined by a portion at which the first upper electrode and the first lower electrode mutually overlap in the plan view
a second resonator portion defined by a portion at which the second upper electrode and the second lower electrode mutually overlap in the plan view;
a first acoustic reflection film on the second main surface of the piezoelectric layer so as to overlap with the first resonator portion in the plan view and cover at least a portion of the first lower electrode; and
a second acoustic reflection film on the second main surface of the piezoelectric layer so as to overlap with the second resonator portion in the plan view and cover at least a portion of the second lower electrode; wherein
the first acoustic reflection film includes at least one first metal layer and the second acoustic reflection film includes at least one second metal layer;
the first acoustic wave resonator and the second acoustic wave resonator share the piezoelectric layer, the first acoustic wave resonator includes the first upper electrode, the first lower electrode, and the first acoustic reflection film, and the second acoustic wave resonator includes the second upper electrode, the second lower electrode, and the second acoustic reflection film;
a first overlapping portion is defined by a portion at which only the first upper electrode out of the first upper electrode and the first lower electrode overlaps with the first metal layer in the plan view;
a second overlapping portion is defined by a portion at which only the second upper electrode of the second upper electrode and the second lower electrode overlaps with the second metal layer in the plan view;
an area of the first resonator portion in the plan view is smaller than an area of the second resonator portion in the plan view; and
an area of the first overlapping portion in the plan view is larger than an area of the second overlapping portion in the plan view.