US 12,191,840 B2
Acoustic wave device
Tetsuya Kimura, Nagaokakyo (JP); Sho Nagatomo, Nagaokakyo (JP); and Takashi Yamane, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 23, 2022, as Appl. No. 17/701,978.
Application 17/701,978 is a continuation of application No. PCT/JP2020/036396, filed on Sep. 25, 2020.
Claims priority of application No. 2019-178101 (JP), filed on Sep. 27, 2019.
Prior Publication US 2022/0216848 A1, Jul. 7, 2022
Int. Cl. H03H 9/13 (2006.01); H03H 9/02 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/13 (2013.01) [H03H 9/02031 (2013.01); H03H 9/02228 (2013.01); H03H 9/174 (2013.01); H03H 9/175 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a piezoelectric layer; and
a first electrode and a second electrode facing each other in a direction crossing a thickness direction of the piezoelectric layer; wherein
a material of the piezoelectric layer is lithium niobate or lithium tantalate;
each of the first electrode and the second electrode includes an aluminum layer on the piezoelectric layer; and
an orientation direction of a crystal of the aluminum layer is a direction orthogonal or substantially orthogonal to a surface on a piezoelectric layer side of the aluminum layer.