US 12,191,839 B2
Acoustic wave device
Hideki Iwamoto, Nagaokakyo (JP); Katsuya Daimon, Nagaokakyo (JP); and Tetsuya Kimura, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jul. 28, 2022, as Appl. No. 17/875,496.
Application 17/875,496 is a continuation of application No. PCT/JP2021/004392, filed on Feb. 5, 2021.
Claims priority of application No. 2020-019048 (JP), filed on Feb. 6, 2020.
Prior Publication US 2022/0368305 A1, Nov. 17, 2022
Int. Cl. H03H 9/02 (2006.01); H03H 9/145 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 9/02015 (2013.01); H03H 9/02559 (2013.01); H03H 9/14541 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An acoustic wave device comprising:
a support substrate;
a piezoelectric layer over the support substrate in a thickness direction of the support substrate; and
an IDT electrode on the piezoelectric layer, the IDT electrode including a plurality of electrode fingers; wherein
an intersecting width of the plurality of electrode fingers is equal to or smaller than about 5λ.