US 12,191,292 B2
Composite integrated film, composite integrated film supply wafer, and semiconductor composite device
Takuma Ishikawa, Tokyo (JP); Takahito Suzuki, Tokyo (JP); Kenichi Tanigawa, Tokyo (JP); Hironori Furuta, Tokyo (JP); Toru Kosaka, Tokyo (JP); Yusuke Nakai, Tokyo (JP); Shinya Jyumonji, Tokyo (JP); Genichiro Matsuo, Tokyo (JP); Chihiro Takahashi, Tokyo (JP); Hiroto Kawada, Tokyo (JP); and Yuuki Shinohara, Tokyo (JP)
Assigned to Oki Electric Industry Co., Ltd., Tokyo (JP)
Filed by Oki Electric Industry Co., Ltd., Tokyo (JP)
Filed on Oct. 18, 2021, as Appl. No. 17/504,306.
Claims priority of application No. 2020-190406 (JP), filed on Nov. 16, 2020.
Prior Publication US 2022/0157796 A1, May 19, 2022
Int. Cl. H01L 25/16 (2023.01); H01L 33/62 (2010.01)
CPC H01L 25/167 (2013.01) [H01L 33/62 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A composite integrated film comprising:
a base member thin film having a base member first surface and a base member second surface facing each other, the base member thin film having a thickness less than or equal to 20 [μm] and being formed of an insulating material;
one or more penetration parts penetrating the base member first surface and the base member second surface of the base member thin film;
one or more electrodes each including an electrical path part formed between the base member first surface and the base member second surface via the penetration part and an electrode surface in a planar shape formed on the base member second surface's side, the one or more electrodes being each provided to step over to the base member first surface's side;
one or more elements provided on the base member first surface of the base member thin film and electrically connected to the electrodes; and
one or more wiring members provided on the base member first surface of the base member thin film, and directly connecting the one or more electrodes and the one or more elements, respectively,
wherein the electrode surface and the base member second surface form a same flat surface.