| CPC H01L 21/68707 (2013.01) [B25J 11/0095 (2013.01); B25J 15/0052 (2013.01)] | 4 Claims |
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1. An industrial robot, comprising:
a mounting mechanism, on which a plurality of conveyance objects is mounted, wherein
the mounting mechanism comprises a plurality of hands whose number is at least three or more, each of the hands comprising a mounting part for the conveyance object, and the plurality of the hands being overlapped with each other at a predetermined pitch in an upper and lower direction,
each of the hands comprises:
a blade holding member of the mounting part,
a fixing member, to which the blade holding member is fixed, and
a bolt, having a head for fixing the blade holding member to the fixing member,
the fixing members of the plurality of the hands are overlapped with each other at the predetermined pitch in the upper and lower direction,
the blade holding member is fixed to the fixing member in a state that the blade holding member is overlapped with the fixing member in the upper and lower direction by the bolt disposed with the upper and lower direction as an axial direction,
when the bolt whose head part is disposed on a lower side is referred to as an upward bolt, and the bolt whose head part is disposed on an upper side is referred to as a downward bolt and, when each of the hands having the upward bolt except the hand disposed uppermost and except the hand disposed at a bottom among the plurality of the hands is referred to as a first hand, and each of the hands having the downward bolt except the hand disposed uppermost and except the hand disposed at the bottom among the plurality of the hands is referred to as a second hand,
in a case that the mounting mechanism comprises the first hand, all of the fixing members and the blade holding members of the hands which are disposed on a lower side with respect to the upward bolt of the first hand are formed with through holes for engaging a tool with the head part of the upward bolt of the first hand from a lower side with respect to the hand disposed at the bottom, and
in a case that the mounting mechanism comprises the second hand, all of the fixing members and the blade holding members of the hands which are disposed on an upper side with respect to the downward bolt of the second hand are formed with through holes for engaging a tool with the head part of the downward bolt of the second hand from an upper side with respect to the hand disposed uppermost, and
an inside diameter of the through hole is larger than an outside diameter of the head part.
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