US 12,191,187 B2
Dual arm with opposed dual end effectors and no vertical wafer overlap
Scott Wilkas, Lexington, MA (US)
Assigned to PERSIMMON TECHNOLOGIES CORPORATION, Wakefield, MA (US)
Filed by Persimmon Technologies Corporation, Wakefield, MA (US)
Filed on Oct. 15, 2020, as Appl. No. 17/071,486.
Claims priority of provisional application 62/915,884, filed on Oct. 16, 2019.
Prior Publication US 2021/0118719 A1, Apr. 22, 2021
Int. Cl. H01L 21/687 (2006.01); B25J 9/04 (2006.01); B25J 11/00 (2006.01); B25J 15/00 (2006.01)
CPC H01L 21/68707 (2013.01) [B25J 9/043 (2013.01); B25J 11/0095 (2013.01); B25J 15/0052 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a drive; and
a movable arm assembly connected to the drive, where the movable arm assembly comprises a first arm and a second arm, where the first arm comprises a first upper arm, a first forearm and a first end effector, where the second arm comprises a second upper arm, a second forearm and a second end effector, where the first end effector comprises at least two first upper substrate holding areas, where the second end effector comprises at least two second lower substrate holding areas, where the drive and the movable arm assembly are configured to prevent the movable arm assembly from passing over top sides of substrates located on the second lower substrate holding areas of the second end effector.