US 12,191,186 B2
Actively clamped carrier assembly for processing tools
Benjamin B. Riordon, Newburyport, MA (US); and James D. Strassner, Austin, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 21, 2023, as Appl. No. 18/338,443.
Application 18/338,443 is a division of application No. 17/119,382, filed on Dec. 11, 2020, granted, now 11,715,662.
Prior Publication US 2023/0352336 A1, Nov. 2, 2023
Int. Cl. H01L 21/683 (2006.01); B05C 21/00 (2006.01); C23C 14/04 (2006.01); C23C 16/04 (2006.01); C23C 16/458 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/6838 (2013.01) [B05C 21/005 (2013.01); C23C 14/042 (2013.01); C23C 16/042 (2013.01); C23C 16/4585 (2013.01); H01L 21/02266 (2013.01); H01L 21/68721 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A carrier assembly, comprising:
a mask, the mask including a pattern of openings disposed through the mask, the mask including pinholes;
a carrier, the carrier including:
a magnet disposed in the carrier, the magnet magnetically coupled to the mask;
a plurality of pockets recessed into the carrier, each pocket of the plurality of pockets having a width corresponding to a substrate to be disposed therein, each substrate of the plurality of substrates to be disposed in each pocket of the plurality of pockets abuts sidewalls of a respective pocket; and alignment pins disposed in the carrier and disposed through the pinholes in the mask, the alignment pins adjacent to a sidewall of the sidewalls of the plurality of pockets.