US 12,191,176 B2
Integrated substrate measurement system to improve manufacturing process performance
Upendra V. Ummethala, Cupertino, CA (US); Blake Erickson, Gilroy, CA (US); Prashanth Kumar, Union City, CA (US); Michael Kutney, Santa Clara, CA (US); Steven Trey Tindel, Austin, TX (US); and Zhaozhao Zhu, Milpitas, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Jun. 15, 2023, as Appl. No. 18/335,899.
Application 18/335,899 is a continuation of application No. 17/379,653, filed on Jul. 19, 2021, granted, now 11,688,616.
Claims priority of provisional application 63/055,239, filed on Jul. 22, 2020.
Prior Publication US 2023/0326773 A1, Oct. 12, 2023
Int. Cl. H01L 21/67 (2006.01); H01L 21/66 (2006.01)
CPC H01L 21/67253 (2013.01) [H01L 21/67288 (2013.01); H01L 22/20 (2013.01); H01L 21/67063 (2013.01); H01L 21/67167 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A method comprising:
identifying a process recipe associated with a substrate at a manufacturing system by a controller which is operatively coupled to the manufacturing system;
obtaining a first set of measurements for the substrate from a substrate measurement subsystem;
obtaining a second set of measurements for the substrate from one or more sensors of a chamber of the manufacturing system; and generating a mapping between the first set of measurements and the second set of measurements of the substrate; storing the first set of measurements mapped to the second set of measurements;
determining, based on the obtained first set of measurements mapped to the obtained second set of measurements, whether to modify the process recipe by at least one of:
modifying an operation of the process recipe, or
generating an instruction to prevent completion of execution of one or more operations of the process recipe; and
providing, via a user interface of a client device connected to the manufacturing system, a notification of the modification to the process recipe.