CPC H01J 49/401 (2013.01) [H01J 49/068 (2013.01); H05K 1/0233 (2013.01); H05K 1/181 (2013.01); H05K 2201/10151 (2013.01)] | 4 Claims |
1. A set of acceleration electrodes for the acceleration of charged particles in a vacuum ion optical system, each acceleration electrode comprises:
a conical section; and
an elongated leg protruding from the conical section, the elongated leg configured as a mechanical support and as an electrical connection between the conical section and a source for an electric potential.
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