receiving, by a processing device, (i) sensor data indicating a first state of a coating of a processing chamber processing a substrate subsequent to a chamber recovery procedure performed on the processing chamber and (ii) substrate process data indicating a set of process parameter values associated with performing a substrate processing procedure by the processing chamber having the coating in a second state prior to the chamber recovery procedure;

processing the sensor data and the substrate process data using one or more machine learning models (MLMs) to determine one or more outputs, the one or more outputs comprising a first update to at least one of the set of process parameter values, wherein the first update is associated with performing the substrate processing procedure by the processing chamber having the coating in the first state; and

performing, by the processing device, at least one of a) preparing a notification indicating the first update for presentation on a graphical user interface (GUI) or b) causing the processing chamber to perform a selection of the substrate processing procedure based on the first update.