US 12,191,113 B2
Systems and methods for optimizing full horizontal scanned beam distance
Tyler Wills, Marblehead, MA (US); George M. Gammel, Marblehead, MA (US); Eric Donald Wilson, Rockport, MA (US); Jay T. Scheuer, Rowley, MA (US); Xiangdong He, Westborough, MA (US); Shardul Patel, North Reading, MA (US); and Robert C. Lindberg, Rockport, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 27, 2022, as Appl. No. 17/827,204.
Prior Publication US 2023/0386785 A1, Nov. 30, 2023
Int. Cl. H01J 37/304 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/3045 (2013.01) [H01J 37/3171 (2013.01); H01J 2237/24405 (2013.01); H01J 2237/30477 (2013.01); H01J 2237/30483 (2013.01)] 20 Claims
OG exemplary drawing
 
8. An apparatus for optimizing a scanned beam distance of a spot ion beam, the apparatus comprising:
a beam scanner operable to scan the spot ion beam with respect to an intended beam-scan area;
a Faraday cup along a first side of an intended beam-scan area;
a Faraday profiler along a second side of the intended beam-scan area, wherein the Faraday cup is operable to measure a first beam current of the spot ion beam and the Faraday profiler is operable to measure a second beam current of the spot ion beam; and
a beam calibration component, comprising a controller and a memory, the memory comprising a calibration routine, operative on the controller, to:
determine a first overscan value by adding a first product and a length dimension measured between a first aperture of the Faraday cup at a Faraday cup position and the first side of the intended beam-scan area, wherein the first product is obtained by multiplying a beamwidth of the spot ion beam by a first multiplier, and wherein the first multiplier is determined from a first predetermined threshold of the first beam current of the spot ion beam at the Faraday cup position; and
determine a second overscan value by multiplying the beamwidth with a second multiplier, wherein the second multiplier is determined from a second predetermined threshold of the second beam current of the spot ion beam at a Faraday profiler position.