US 12,191,111 B2
Charged particle beam system and method for determining observation conditions in charged particle beam device
Fumiya Ishizaka, Tokyo (JP); Daisuke Bizen, Tokyo (JP); and Makoto Suzuki, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/594,656
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed May 8, 2019, PCT No. PCT/JP2019/018454
§ 371(c)(1), (2) Date Oct. 25, 2021,
PCT Pub. No. WO2020/225891, PCT Pub. Date Nov. 12, 2020.
Prior Publication US 2022/0246394 A1, Aug. 4, 2022
Int. Cl. H01J 37/28 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 2237/2803 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A charged particle beam system comprising:
a charged particle device including a charged particle source, a deflector that scans a primary charged particle beam emitted from the charged particle source on a sample, an energy discriminator that energy-discriminates a secondary electron emitted when the primary charged particle beam reaches the sample and a detector that detects the secondary electron that has passed through the energy discriminator; and
a computer system that generates a scan image based on a detection signal amount of the detector that fluctuates according to scanning of the primary charged particle beam by the deflector and stores the scan image in an image storage unit,
wherein the computer system generates a scan image for each frame of a plurality of frames obtained by the detector at the time of frame integration of the scan image, wherein the scan image for each frame is acquired by continuously scanning a specific portion of the sample with the primary charged particle beam, calculates a charging amount for each frame based on an output of the scan image for each frame, and outputs information on the charging amount.