a stage on which a workpiece is placed;

a light projecting section which irradiates the workpiece on the stage with detection light;

an imaging section which receives the detection light and generates a workpiece image;

a touch probe configured for measurement of three-dimensional coordinates of a contact point by coming into contact with the workpiece on the stage;

a driving section which relatively moves the stage or the touch probe in a normal direction of the stage, a direction parallel to an upper surface of the stage, or a direction inclined from the normal direction to bring the touch probe into contact with a surface of the workpiece placed on the stage;

a display section which displays the workpiece image generated by the imaging section during measurement setting of the touch probe;

a setting section which sets a measurement element having a geometric shape for measurement execution by the touch probe on the workpiece image displayed on the display section;

a storage section which stores in advance a correspondence relationship between a shape type and a size of the measurement element settable by the setting section, and positions and a number of contact target positions of the touch probe to be arranged with respect to the measurement element;

a control section which specifies a plurality of contact target positions of the touch probe based on a position of the measurement element on the workpiece image set by the setting section, the shape type or the size of the measurement element, and the correspondence relationship stored in advance in the storage section during the measurement execution by the touch probe, and controls the driving section to move the touch probe sequentially to the plurality of specified contact target positions; and

a measuring section which measures the three-dimensional coordinates of the contact point at which the touch probe comes into contact with the workpiece based on a contact signal output when the touch probe is brought into contact with the workpiece by an operation of the driving section controlled by the control section.