US 12,189,380 B2
Diagnostic tool to tool matching and comparative drill-down analysis methods for manufacturing equipment
Sejune Cheon, Seoul (KR); Jeong Jin Hong, Yongin (KR); Mikyung Shim, Seongnam (KR); Xiaoqun Zou, Danville, CA (US); Jinkyeong Lee, Seoul (KR); and Sang Hong Kim, Seoul (KR)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 27, 2022, as Appl. No. 17/586,701.
Prior Publication US 2023/0259112 A1, Aug. 17, 2023
Int. Cl. G05B 23/02 (2006.01)
CPC G05B 23/0254 (2013.01) [G05B 23/0283 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A method, comprising:
obtaining sensor data during a first manufacturing procedure of a manufacturing chamber;
generating summary data based on the sensor data, the generating the summary data comprising:
identifying a steady state portion of the sensor data and generating a first portion of the summary data based on the steady state portion, and
identifying a transient portion of the sensor data and generating a second portion of the summary data based at least in part on one or more differences between the transient portion and predicted data associated with the transient portion;
receiving reference data, wherein the reference data comprises data associated with the sensor data;
providing the summary data and the reference data to a comparison model;
receiving from the comparison model a similarity score associated with the summary data and the reference data; and
causing performance of a corrective action in view of the similarity score.