US 12,189,369 B2
In-situ sensor-fusion with artificial intelligence
Yu Ding, Lake Oswego, OR (US); Quan Ma, Tigard, OR (US); Gerramine S. Manuguid, Lake Oswego, OR (US); Shantinath Ghongadi, Tigard, OR (US); and Robert Marshall Stowell, Wilsonville, OR (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/641,352
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Aug. 11, 2020, PCT No. PCT/US2020/045801
§ 371(c)(1), (2) Date Mar. 8, 2022,
PCT Pub. No. WO2021/050189, PCT Pub. Date Mar. 18, 2021.
Claims priority of provisional application 62/898,468, filed on Sep. 10, 2019.
Prior Publication US 2022/0342387 A1, Oct. 27, 2022
Int. Cl. G05B 19/416 (2006.01)
CPC G05B 19/416 (2013.01) [G05B 2219/37371 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system, comprising:
a liquid-level sensor configured to determine a level of a liquid in a fluid reservoir;
a mass-detection device configured to determine a mass of the fluid reservoir and liquid contained therein;
a processor electrically coupled to the liquid-level sensor and the mass-detection device to determine a measured volume of liquid as determined by the level of the liquid, the processor further to determine an actual volume of the liquid within the fluid reservoir based on a mass of the liquid contained within the fluid reservoir; and
a showerhead coupled to the processor and positioned above the fluid reservoir, the showerhead to be activated by the processor when the measured volume of liquid determined by the liquid-level sensor exceeds the actual volume of the liquid as determined by the mass-detection device by a predetermined amount, a combination of the liquid-level sensor, the mass-detection device, the processor, and the showerhead thereby comprising an in-situ, closed-loop bubble and foam detection and reduction system.