US 12,189,345 B2
Atomic cell, method for manufacturing atomic cell, and quantum interference device
Takuya Miyakawa, Matsumoto (JP); and Yasushi Tsuchiya, Fujimi (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Feb. 21, 2023, as Appl. No. 18/111,915.
Claims priority of application No. 2022-025385 (JP), filed on Feb. 22, 2022.
Prior Publication US 2023/0266716 A1, Aug. 24, 2023
Int. Cl. G04F 5/14 (2006.01)
CPC G04F 5/145 (2013.01) 19 Claims
OG exemplary drawing
 
1. An atomic cell filled with an alkali metal, the atomic cell comprising:
a substrate;
a first coating layer provided on an inner wall of the substrate and derived from a first molecule;
a second coating layer provided on the first coating layer, and derived from a second molecule having a non-polar group and a reactive group that undergoes a desorption reaction with the first molecule; and
a third coating layer provided on the second coating layer and derived from a non-polar third molecule, wherein
the third coating layer has a degree of crystallinity of 70% or more.