	US 12,189,286 B2
	Organometallic solution based high resolution patterning compositions
Stephen T. Meyers, Corvallis, OR (US); Douglas A. Keszler, Corvallis, OR (US); Kai Jiang, Corvallis, OR (US); Jeremy T. Anderson, Corvallis, OR (US); and Andrew Grenville, Corvallis, OR (US)
Assigned to Inpria Corporation, Corvallis, OR (US)
Filed by Inpria Corporation, Corvallis, OR (US)
Filed on Sep. 6, 2022, as Appl. No. 17/903,672.
Application 17/903,672 is a continuation of application No. 17/830,535, filed on Jun. 2, 2022.
Application 17/830,535 is a continuation of application No. 16/536,768, filed on Aug. 9, 2019, granted, now 11,988,958.
Application 16/536,768 is a continuation of application No. 16/007,242, filed on Jun. 13, 2018, granted, now 10,416,554, issued on Sep. 17, 2019.
Application 16/007,242 is a continuation of application No. 14/983,220, filed on Dec. 29, 2015, granted, now 10,025,179, issued on Jul. 18, 2018.
Application 14/983,220 is a continuation of application No. 13/973,098, filed on Aug. 22, 2013, granted, now 9,310,684, issued on Apr. 12, 2016.
Prior Publication US 2023/0004083 A1, Jan. 5, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G03F 7/004 (2006.01); G03F 7/09 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01); G03F 7/32 (2006.01)

CPC G03F 7/0042 (2013.01) [G03F 7/0043 (2013.01); G03F 7/09 (2013.01); G03F 7/20 (2013.01); G03F 7/2002 (2013.01); G03F 7/2037 (2013.01); G03F 7/30 (2013.01); G03F 7/32 (2013.01); G03F 7/322 (2013.01); G03F 7/325 (2013.01)]

22 Claims

1. An article comprising:

a substrate with a surface and a patterned coating,

wherein the patterned coating comprises a first material and/or a second material, wherein the first material comprises a first metal oxo-hydroxo network having first organic ligands associated with first metal cations, the first organic ligands forming metal carbon bonds and/or metal carboxylate bonds, wherein the first material is soluble in at least some organic liquids, wherein the second material comprises a second metal oxo-hydroxo network having second organic ligands associated with second metal cations, the second organic ligands forming metal carbon bonds and/or metal carboxylate bonds, wherein the second material is soluble in aqueous bases and/or aqueous acids and wherein the second material is chemically different from the first material:

A) wherein the patterned coating comprises the first material at selected regions along the surface and absent at other regions along the surface,

and alternatively 1) wherein the substrate surface is exposed at the regions of the substrate where the first material is absent or 2) wherein the patterned coating further comprises the second material along the surface of the substrate at the regions of the substrate where the first material is absent, or

B) wherein the patterned coating comprises the second material at selected regions along the surface and absent at other regions along the surface, wherein the substrate surface is exposed at the regions of the substrate where the second material is absent.