US 12,189,263 B2
Transparent conducting oxide (TCO) based integrated modulators
Rubab Amin, Fairfax, VA (US); and Volker J. Sorger, Alexandria, VA (US)
Assigned to The George Washington University, Washington, DC (US)
Filed by The George Washington University, Washington, DC (US)
Filed on Feb. 25, 2022, as Appl. No. 17/681,158.
Application 17/681,158 is a division of application No. 16/545,733, filed on Aug. 20, 2019, granted, now 11,281,067.
Claims priority of provisional application 62/719,988, filed on Aug. 20, 2018.
Prior Publication US 2022/0179279 A1, Jun. 9, 2022
Int. Cl. G02F 1/225 (2006.01); G02F 1/025 (2006.01); G02F 1/015 (2006.01); G02F 1/21 (2006.01)
CPC G02F 1/225 (2013.01) [G02F 1/025 (2013.01); G02F 1/0157 (2021.01); G02F 1/212 (2021.01); G02F 2203/10 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A photonic Mach Zehnder Interferometer (MZI) assembly operating across a broadband spectral region, comprising:
a first arm comprising a first photonic waveguide transmitting a first light having a first phase;
a second arm comprising a second photonic waveguide transmitting a second light having a second phase;
the first arm and the second arm forming a photonic MZI operating across a broadband spectral region;
a gate oxide that contacts and surrounds at least a portion of said first arm; a current-driven Transparent Conducting Oxide (TCO) based assembly that contacts and surrounds at least a portion of the gate oxide;
a voltage source coupled to the current-driven TCO based assembly to apply a voltage to the current driven TCO based assembly to modulate the first phase of the first light traveling in said first photonic waveguide; and
a ground coupled to the first arm or the second arm.