a substrate having a planar top surface;

a silicon rib waveguide arranged on the top surface of the substrate and having a facet, the rib waveguide comprising a base section and a ridge protruding from the base section;

a silicon support layer, a first portion of the support layer being spaced apart from the facet and opposing the facet, a second portion of the support layer adjacent to the first portion of the support layer having a side surface and a top surface, and the top surface of the second portion of the support layer and a top surface of the base section having a same height from the substrate;

a reflection layer defining a reflective surface, the reflection layer being on the support layer and extending from the side surface onto the top surface of the second portion of the support layer, the reflection layer and the support layer being different in material, and the reflection layer having a thickness of 250 nm or more;

a filler portion between the facet and the reflective surface, the filler portion being directly on the reflection layer and comprising a material having a first refractive index, and the reflection layer having a second refractive index less than the first refractive index such that a light beam coming from the waveguide and impinging on the reflection layer is reflected by total internal reflection;

a cladding on the base section and on a side of the ridge of the rib waveguide, the cladding and the reflection layer being the same in material, a thickness of the reflection layer on the top surface of the second portion of the support layer and a thickness of the cladding being the same, and a top surface of the ridge of the rib waveguide, a top surface of the cladding, a top surface of the filler portion, and a top surface of the reflection layer on the second portion of the support layer together forming a continuous flat surface; and

an anti-reflection coating comprising a first top layer arranged on a portion of the continuous flat surface formed by at least part of the top surface of the filler portion, at least part of the top surface of the ridge, at least part of the top surface of the cladding, and at least part of the top surface of the reflection layer, the first top layer having a refractive index less than a refractive index of the filler portion,

wherein the reflective surface is arranged spaced apart from the facet and opposing the facet,

wherein the reflective surface is inclined with respect to a normal to the top surface of the substrate by 46° to 51°,

wherein the reflective surface is aligned on the substrate, in a plan view parallel to the top surface of the substrate, at approximately 90° to a direction of light emitted from the facet.