US 12,189,153 B2
Transmission grating and laser device using the same, and method of producing transmission grating
Yukitoshi Marutani, Anan (JP)
Assigned to NICHIA CORPORATION, Anan (JP)
Filed by NICHIA CORPORATION, Anan (JP)
Filed on Mar. 26, 2021, as Appl. No. 17/214,122.
Application 17/214,122 is a division of application No. 15/961,090, filed on Apr. 24, 2018, granted, now 11,002,893.
Claims priority of application No. 2017-086432 (JP), filed on Apr. 25, 2017.
Prior Publication US 2021/0239888 A1, Aug. 5, 2021
Int. Cl. G02B 5/18 (2006.01); G02B 27/10 (2006.01); H01S 5/40 (2006.01); H01S 5/14 (2006.01)
CPC G02B 5/18 (2013.01) [G02B 27/1086 (2013.01); H01S 5/4012 (2013.01); H01S 5/4062 (2013.01); H01S 5/4087 (2013.01); G02B 5/1866 (2013.01); H01S 5/141 (2013.01); H01S 5/4031 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of producing a transmission grating, the method comprising:
stacking a plurality of thin glass plates of a same thickness with a predetermined space between each two adjacent thin glass plates to obtain a multi-layered glass structure in which each two adjacent thin glass plates face each other across the space;
thermally fusing glass on each lateral surface of the multi-layered glass structure to confine the spaces in the multi-layered glass structure;
supporting the multi-layered glass structure containing the confined spaces, using a glass support structure, at an upper surface, a lower surface, and two lateral surfaces opposite to each other with respect to a central axis that is parallel to the upper surface and the lower surface of the multi-layered structure;
heating the multi-layered glass structure together with the glass support structure to collectively soften the multi-layered glass structure and the glass support structure, and drawing the multi-layered glass structure together with the glass support structure in a direction parallel to the central axis; and
cutting the drawn multi-layered glass structure together with the glass support structure in a direction parallel to a second plane that is perpendicular to a first plane that includes the central axis and a stacking direction of the thin glass plates.