CPC G01R 31/2863 (2013.01) [G01R 1/07314 (2013.01)] | 10 Claims |
1. A probe unit comprising:
a plurality of first contact probes each coming into contact with an electrode to be contacted on one end side in a longitudinal direction;
a second contact probe connected to an external ground; and
a probe holder configured to hold the first and second contact probes, the probe holder including
a first hollow portion configured to allow the first contact probes to be inserted therethrough and hold the first contact probes,
a second hollow portion configured to allow the second contact probe to be inserted therethrough and hold the second contact probe, and
a through-hole provided around the first hollow portion, wherein
the probe holder includes a conductive portion that constitutes the through-hole and electrically connects the through-hole and the second contact probe.
|