US 12,188,962 B2
Amplitude-modulating probe card and its probe and amplitude-modulating structure
Ailin Wang, Suzhou (CN); and Liangyu Zhao, Suzhou (CN)
Assigned to MAXONE SEMICONDUCTOR CO., LTD., Suzhou (CN)
Appl. No. 18/031,215
Filed by MAXONE SEMICONDUCTOR CO., LTD., Jiangsu (CN)
PCT Filed Jul. 27, 2021, PCT No. PCT/CN2021/108631
§ 371(c)(1), (2) Date Apr. 11, 2023,
PCT Pub. No. WO2022/073375, PCT Pub. Date Apr. 14, 2022.
Claims priority of application No. 202011081026.5 (CN), filed on Oct. 11, 2020.
Prior Publication US 2023/0384348 A1, Nov. 30, 2023
Int. Cl. G01R 1/07 (2006.01); G01R 1/073 (2006.01); G01R 1/20 (2006.01); G01R 31/28 (2006.01)
CPC G01R 1/07342 (2013.01) [G01R 1/20 (2013.01); G01R 31/2889 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An amplitude-modulating probe card, wherein it comprises a probe, a probe board, a circuit board, and an amplitude-modulating structure; the probe is fixed on the probe board, one end of the probe is connected to the circuit board, and the other end of the probe is clamped on the amplitude-modulating structure;
the probe comprises a probe head, a bent wire and a fixed wire; one end of the probe head is a circular probe used for detection, the middle of the probe head is clamped on the amplitude-modulating structure, the other end of the probe head is connected to one end of the bent wire, the middle of the bent wire is an elastic structure, the other end of the bent wire is connected to one end of the fixed wire, the middle of the fixed wire is fixed on the probe board, and the other end of the fixed wire is connected to the circuit board;
the amplitude-modulating structure comprises a fixed board, an amplitude-modulating board, an amplitude modulation connecting board, a reed, an amplitude modulation clamp board, an amplitude-modulating shaft, a main roller, and an eccentric roller roller; the fixed board is fixedly connected to the circuit board, and the upper end of the amplitude-modulating board is fixedly connected to the amplitude modulation connecting board, the lower end of the amplitude-modulating board vertically passes through the fixed board, circuit board, and probe board, and then is fixedly connected to the probe; a reed is set between the lower end of the amplitude modulation connecting board and the fixed board, and the side of the amplitude modulation connecting board is clamped by the amplitude modulation clamp plate, forming a sliding structure perpendicular to the fixed board; the amplitude-modulating shaft is arranged above the amplitude modulation connecting board, and a main roller and an eccentric roller are arranged on the amplitude-modulating shaft;
the multiple amplitude modulation connecting boards are arranged along the probes with one amplitude modulation connecting board arranged corresponding to the main roller, and with the remaining amplitude modulation connecting boards arranged corresponding to the eccentric roller;
the main roller is a circular roller arranged coaxially on the amplitude-modulating shaft, and the eccentric roller is provided with a virtual circle inside it, and the eccentric roller is provided with an eccentric notch that reaches the virtual circle on its edge; the eccentric notches of the multiple eccentric rollers increase sequentially along the direction from the main roller to the direction away from the main roller, and one side of the multiple eccentric notches is aligned.