| CPC G01Q 70/04 (2013.01) [G01Q 20/00 (2013.01); G01Q 30/06 (2013.01); G01Q 60/16 (2013.01)] | 20 Claims |
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1. A scanning probe microscope, comprising:
an existing scanning probe microscope (SPM) including:
a sample holder for holding a sample with a surface;
a probe operable to provide a probe signal based on the surface of the sample disposed on the sample holder;
a sensor external to the existing SPM generating a sensor signal based on an ambient vibration, the sensor and probe signals being dimensionally-distinct physical quantities, the ambient vibration creating a relative motion between the probe and the sample surface, the relative motion due to the ambient vibration adding noise to the probe signal; and
a processing unit generating a correction signal by convolution involving dimensioned parameters to account for the sensor and probe being the dimensionally-distinct physical quantities and determining a relationship between the sensor signal and a displacement of the probe based on the probe signal and the sensor signal, the processing unit removing noise from the probe signal by applying the correction signal to the probe signal.
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