US 12,188,958 B2
Angular velocity sensor, electronic apparatus, and vehicle
Kazuyuki Nagata, Minowa (JP); and Takayuki Kikuchi, Chino (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Oct. 26, 2023, as Appl. No. 18/494,870.
Application 18/494,870 is a continuation of application No. 18/171,483, filed on Feb. 20, 2023, granted, now 11,852,652.
Application 18/171,483 is a continuation of application No. 17/742,788, filed on May 12, 2022, granted, now 11,747,358, issued on Sep. 5, 2023.
Application 17/742,788 is a continuation of application No. 16/285,793, filed on Feb. 26, 2019, granted, now 11,378,584, issued on Jul. 5, 2022.
Claims priority of application No. 2018-032897 (JP), filed on Feb. 27, 2018.
Prior Publication US 2024/0053375 A1, Feb. 15, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01P 3/44 (2006.01); G01C 19/5649 (2012.01)
CPC G01P 3/44 (2013.01) [G01C 19/5649 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A gyro sensor comprising:
three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis;
a substrate; and
an element section that is supported on the upper surface of the substrate located on a positive side of the Z-axis and detects an angular velocity, wherein
the element section comprises:
a first trunk part, including a first edge located on a positive side of the X-axis and a second edge located on an opposite side of the first edge and on a negative side of the X-axis, and extending in a Y-axis direction along the Y-axis;
a first electrode including a plurality of first electrode fingers extending in an X-axis direction along the X-axis from the first edge of the first trunk part on the positive side of the X-axis, and arranged in line in the Y-axis direction along the Y-axis; and
a spring extending in the Y-axis direction,
wherein the second edge includes a first surface facing the spring,
the first surface includes a slanted portion that is slanted with respect to the extending direction of the spring in a plan view from the Z-axis direction along the Z-axis, and
a distance between one end side of the first surface and the spring is different from a distance between another end side of the first surface and the spring in the plan view from the Z-axis direction.