US 12,188,859 B2
Apparatus comprising at least one THz device and method of operating such apparatus
Rüdiger Mästle, Böblingen (DE); Henry Thiele, Grafenau (DE); and Andreas Godorr, Maulbronn (DE)
Assigned to HELMUT FISCHER GMBH INSTITUT FÜR ELEKRONIK UND MESSTECHNIK, Sindelfingen (DE)
Appl. No. 17/428,940
Filed by HELMUT FISCHER GMBH INSTITUT FÜR ELEKTRONIK UND MESSTECHNIK, Sindelfingen (DE)
PCT Filed Jul. 17, 2020, PCT No. PCT/EP2020/070382
§ 371(c)(1), (2) Date Aug. 5, 2021,
PCT Pub. No. WO2021/013766, PCT Pub. Date Jan. 28, 2021.
Claims priority of application No. 19187325 (EP), filed on Jul. 19, 2019.
Prior Publication US 2022/0120667 A1, Apr. 21, 2022
Int. Cl. G01N 21/15 (2006.01); G01N 21/3581 (2014.01); G01B 11/06 (2006.01); G01N 21/88 (2006.01)
CPC G01N 21/15 (2013.01) [G01N 21/3581 (2013.01); G01B 11/0616 (2013.01); G01N 2021/151 (2013.01); G01N 21/8806 (2013.01)] 32 Claims
OG exemplary drawing
 
1. An apparatus comprising:
at least one Terahertz (THz) device configured to transmit and/or receive THz radiation, said apparatus being configured to provide a flow of protective gas in at least one portion of a beam path of said THz radiation, wherein said flow of protective gas comprises a free jet,
wherein said apparatus further comprises at least one nozzle configured to direct at least a portion of said flow of protective gas to said at least one portion of said beam path of said THz radiation,
wherein said at least one nozzle is arranged a) parallel with respect to said beam path of said THz radiation or a reference axis of said at least one THz device and/or coaxially with respect to said beam path of said THz radiation or a reference axis of said at least one THz device; or b) at an acute angle with respect to said beam path of said THz radiation or a reference axis of said at least one THz device.