US 12,188,835 B2
Load sensor element and manufacturing method of load sensor element
Homare Kaneko, Ina (JP); Natsumi Shiobara, Ina (JP); Koichi Urano, Ina (JP); Yusuke Shibuya, Iwata (JP); and Daichi Kondou, Iwata (JP)
Assigned to KOA Corporation, Nagano (JP); and NTN Corporation, Osaka (JP)
Appl. No. 17/753,198
Filed by KOA Corporation, Ina (JP); and NTN Corporation, Osaka (JP)
PCT Filed Aug. 19, 2020, PCT No. PCT/JP2020/031209
§ 371(c)(1), (2) Date Feb. 23, 2022,
PCT Pub. No. WO2021/039517, PCT Pub. Date Mar. 4, 2021.
Claims priority of application No. 2019-155589 (JP), filed on Aug. 28, 2019.
Prior Publication US 2022/0276105 A1, Sep. 1, 2022
Int. Cl. G01L 1/22 (2006.01); G01L 1/20 (2006.01)
CPC G01L 1/2287 (2013.01) [G01L 1/205 (2013.01); G01L 1/2218 (2013.01); G01L 1/2237 (2013.01); G01L 1/2268 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A load sensor element configured to detect a load, the load sensor element comprising:
a substrate made of a ceramic material or a metal material, the metal material having an insulating layer on its surface;
an inorganic layer having a pressure receiving surface configured to receive the load, the inorganic layer being provided so as to cover a part of a single surface of the substrate;
a thin-layer resistance body formed of a resistance body whose resistance value is changed in accordance with the load received by the inorganic layer, the thin-layer resistance body having a main body portion and both end portions, the main body portion being sandwiched between the substrate and the inorganic layer, the both end portions being mounted on an exposed portion of the substrate, and the exposed portion of the substrate being not covered with the inorganic layer; and
a pair of electrodes electrically connected to the both end portions of the thin-layer resistance body so as to be separated away from the inorganic layer, the electrodes being provided on one side of the substrate, wherein
the inorganic layer is made of a ceramic substrate, and
a thickness of the inorganic layer is from 0.3 mm to 5.0 mm, inclusive.