| CPC G01J 5/20 (2013.01) [G01J 5/046 (2013.01)] | 9 Claims |
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1. A fabricating process for fabricating a microbolometer, the process comprising:
producing anchoring pillars that each extend from a substrate, and that each comprise a corresponding electrical conductor;
producing thermally insulating arms that each comprise a corresponding layer of a metal making contact with the corresponding electrical conductor of the corresponding anchoring pillar, forming a corresponding biasing electrode;
producing a membrane to be suspended above the substrate by the anchoring pillars and the thermally insulating arms, the membrane including:
the biasing electrodes,
an intermediate insulating layer, which partially covers the biasing electrodes and contains corresponding apertures that open onto the corresponding biasing electrodes, and
a thermistor material, which is made of a first compound based on vanadium oxide and which is continuously formed from a central segment that covers the intermediate insulating layer, and from corresponding lateral segments that make contact with the corresponding biasing electrodes through the apertures;
determining a non-zero effective amount of an additional chemical element that, when incorporated by an ion implantation process into the first compound, forms a modified compound, wherein an electrical resistivity of the modified compound, at room temperature, is lower than or equal to 10% of an electrical resistivity, at room temperature, of the first compound; and
incorporating locally, by the ion implantation process, into the lateral segments of the thermistor material, an amount of the additional chemical element higher than or equal to the effective amount.
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